Patents
US
Patent Number 6,479,173 "Semiconductor structure having a crystalline alkaline
earth metal silicon nitride/oxide interface with silicon" issedued 11/12/2002.
US Patent Number 6,693,033 "Method of removing an amorphous oxide from a
monocrystalline surface" issued 02/17/2004.
US Patent Number 6,791,125 "Semiconductor device structures utilizing metal
sulfides" issued
09/14/2004.
US Patent Number 7,091,568 "Electronic device including dielectric layer, and a process for froming the electronic devic" issued 08/15/2006
US Patent Number 7,141,857 "Semiconductor structures and methods of fabricating semiconductor structures comprising hafnium oxide modified with lanthanum, a lanthanide-series metal, or a combination thereof" issued 11/28/2006
US Patent Number 7,235,847 "Semiconductor device having a gate with a thin semiconductive layer" issued 07/26/2007
US Patent Number 7,365,410 "Semiconductor structure having a metallic buffer layer and method for forming" issued 04/29/2008
Publications
- A.A. Demkov, and O.F. Sankey, "Theoretical
investigation of random Si-C alloys", Phys. Rev. B 48, 2207
(1993).
- O.F. Sankey, A.A. Demkov, W.T. Petuskey, and
P.F. McMillan, "Energetics and electronic structure of the hypothetical zinc
blende form of GeC", Modeling Simul. Mater. Sci.Eng. 1, 741
(1993).
- G.B. Adams, M. O'Keeffe, A.A. Demkov, O.F.
Sankey, and Y. Huang, "Wide-band-gap Si in open fourfold-coordinated clathrate
structure", Phys. Rev. B 49, 8048 (1994).
- J. Ortega, A.A. Demkov, and O.F. Sankey,
"Chemisorption of In and Al on GaAs (110)", J. Appl. Phys. 76,
2918 (1994).
- A.A. Demkov, O.F. Sankey, K.E. Schmidt, G.B.
Adams, and M. O'Keeffe, "Theoretical investigation of alkali-metal doping in Si
clathrates", Phys. Rev. B 50, 17001 (1994).
- A.A. Demkov, O.F. Sankey, S. Daftuar, and J.
Gryko, "Wide band gap Si by bending bonds in four-coordinated clathrate
structures", Proceedings of ICPS-22, Vancouver, Canada, D.J. Lockwood
ed., p. 2205, (World Scientific, New Jersey, 1995).
- A.A. Demkov, J. Ortega, M.P. Grumbach, and O.F.
Sankey, "Electronic structure approach for complex silicas", Phys. Rev. B
52, 1618 (1995).
- A.A. Demkov, and O.F. Sankey, "Electronic
structure theory for zeolites" (invited review), in "Access in Nanoporous
Materials",T.J. Pinnavaia and M.F. Thorpe Eds., p. 27 (Plenum Press, New
York, 1995).
- A.A. Demkov, W. Windl and O.F. Sankey,
"Expanded-Volume Phases of Silicon: Zeolites without Oxygen", Phys. Rev. B
53, 11288 (1996).
- A.A. Demkov, and O.F. Sankey, "Clusters stuffed
inside frameworks: electronic structure theory", J. Computer Aided Materials
Design 3, 128 (1996).
- A.A. Demkov, and O.F. Sankey, "Recent
developments in the theory of supralattices" (review), Chem. Mater.
8, 1793 (1996).
- A.A. Demkov, and O.F. Sankey, "Model simulations
of Supralattices: semiconductor Si clusters in Zeolites'', Phys. Rev. B
56, 10497 (1997).
- A.A. Demkov, O.F. Sankey, J. Gryko, and P.F.
McMillan, ¡°Theoretical Predictions of Expanded-Volume Phases of GaAs'', Phys.
Rev. B 55, 6904 (1997)
- A.A. Demkov, and O.F. Sankey, "Supralattices:
another dimension in materials science - theoretical investigation", in
"Studies in Surface Science and Catalysis", H.C. Chon and Y.S. Uh Eds.,
p. 2259 (Elsevier, Amsterdam, 1997).
- J. Gryko, P.F. McMillan, R.F. Marzke, A.A.
Demkov, and O.F. Sankey, "Temperature and Larmor frequency dependence of 23Na
NMR shifts in silicon clathrates", Phys. Rev. B 57, 4172
(1998).
- O.F. Sankey, A.A. Demkov, W. Windl, J.H.
Fritsch, J.P. Lewis, and M. Fuentes-Cabrera, "On the application of approximate
density functionals to complex systems", Int. J. of Quantum Chem.
69, 327 (1998).
- A.A. Demkov and O.F. Sankey, "Theoretical
investigation of supralattices: selenium clusters in zeolites", Microporous and
Mesoporous Mater. 21, 347 (1998).
- A.A. Demkov, O.F. Sankey, and M. Fuentes,
"Structural band gap engineering", in "Materials and Devices of
Silicon-Based Optoelectronics", J.E. Cunningham, S. Coffa, Polman and R.
Soref, p. 355 (Materials Research Society Vol. 486, 1998).
- O.F. Sankey, A.A. Demkov, and T. Lenosky,
"Electronic Structure of Black Sodalite", Phys. Rev. B 57,
15129 (1998).
- W. Windl and A.A. Demkov, "First-Principles
Study of N Impurities in SiC Polytype", in "Defect and Impurity Engineered
Semiconductors II", S. Ashok, J. Chevallier, K. Sumino, B.L. Sopori, and W.
Gotz, p. 181 (Materials Research Society Vol. 510,
1998).
- J. Dong, O.F. Sankey, A.A. Demkov, G.
Ramachandran, J. Gryko, P. McMillan, and W. Windl, "Theoretical calculations of
the vibrational modes in Ge46 clathrate and related MxGayGe46-y type
clathrates", p. 443 (Materials Research Society Vol. 545,
1999).
- A.A. Demkov and O.F. Sankey, "Growth study and
theoretical investigation of the ultra-thin oxide SiO2-Si heterojunction", Phys.
Rev. Lett. 83, 2038 (1999).
- M. Fuentes-Cabrera, et al.,"Theoretical
study of graphitic analogs of simple semiconductors", Modeling and Sim. in
Materials Science and Eng. 7, 929 (1999).
- Korkin, A.A. Demkov, N. Tanpipat, and J.
Andzelm,"Atomistic Modeling of Chemical Vapor Deposition: Silicon Oxynitride",
MSI, Inc. Webpage http://www.msi.com/materials/cases/SiNO.html. (1999).
- A.A. Demkov, R. Liu, X. Zhang, and H. Loechelt,
"Theoretical and experimental investigation of ultra-thin oxynitrides and the
role of nitrogen at the Si-SiO2 interface", Journal of Vacuum Science and
Technology B 18, 2388 (2000).
- A.A. Demkov and R. Liu, "Theoretical and
experimental investigation of ultrathin oxynitride", Mat. Res. Soc. Proceedings
592, 257 (2000).
- Korkin, A.A. Demkov, N. Tanpipat, and J.
Andzelm,"Theoretical investigation of the initial reaction of the NO
decomposition on the Si (100) (2x1) reconstructed surface", Journal of Chemical
Physics 113, 8237 (2000).
- A.A. Demkov, et al., "Theoretical and
experimental analysis of the low dielectric constant of fluorinated silica",
Mater. Res. Soc. Proceedings 579, 255 (2000).
- S. Zollner, A.A. Demkov, R. Liu, P.L. Fejes,
R.B. Gregory, P. Alluri, J. A. Curless, Z. Yu, J. Ramdani, R. Droopad, T.E.
Tiwald, J.N. Hilfiker, and J.A. Woollam, "Optical properties of bulk and
thin-film SrTiO3 on Si and Pt", Journal of Vacuum Science and Technology B
18, 2242 (2000).
- A.A. Demkov, R. Liu, S. Zollner, M. Kottke, D.
Werho, et al., "Theoretical and experimental analysis of the low
dielectric constant of fluorinated silica", Materials Research Society
Proceedings 612, (2000).
- N. Tanpipat, J. Andzelm, B. Delley, A.A. Korkin,
and A.A. Demkov, "Atomistic Modeling of Chemical Vapor Deposition: NO on the Si
(001) (2x1) reconstructed surface", The Electrochemical Society, Proceedings
Volume 2000-13.
- A.A. Demkov, X. Zhang, H. Loechelt, "Theoretical
investigation of ultrathin gate dielectrics", VLSI Design
13, 135 (2001).
- M. Mollat, A.A. Demkov, and P.L. Fejes, "Stable
titanium silicide formation on field oxide after BF2 ion implantation", Journal
of Vacuum Science and Technology B 19, 372 (2001).
- A.A. Demkov and X. Zhang, "Theoretical
investigation of gate dielectrics", Proceedings of the IEEE 27th International
Symposium on Compound Semiconductors, 155 (2001).
- A.A. Demkov, "Investigating Alternative Gate
Dielectrics: A Theoretical Approach", phys. stat. sol. (b)
226, 57 (2001).
- J.P. Lewis, K.R. Glaesemann, G.A. Voth, J.
Fritsch, A.A. Demkov, J. Ortega, and O.F. Sankey, "Further developments in the
local-orbital density-functional-theory tight-binding method", Phys. Rev. B
64, 195103 (2001).
- A.A. Demkov, X. Zhang and D.A. Drabold, "Towards
a first-principles simulation and current-voltage characteristic of atomistic
metal-oxide-semiconductor structures", Phys. Rev. B 64,
125306-1 (2001).
- A.A. Demkov and O.F. Sankey, "Theory of zeolite
supralattices: Se in zeolite LTA", Journal of Physics, Condensed Matter
13, 10433 (2001).
- W. Windl, A.A. Demkov, and O.F. Sankey, "Theory
of strain and electronic structure of Si1-yCy and Si1-x-yGexCy alloys¡±"in
"Silicon-Germanium Carbon Alloys¡±, S. Pantelides and S. Zollner Eds.
p. 237 (Taylor&Francis, 2002).
- X. Zhang and A.A. Demkov, "Steps on the (001)
SrTiO3 surface", Journal of Vacuum Science and Technol. B 20,
1664 (2002).
- Yi Wei, X. Hu, Y. Liang, D. Jordan, B. Craigo,
R. Droopad, Z. Yu, A. Demkov, J. Edwards Jr., and W. Ooms, "Si (001) surface
cleaning using Sr or SrO", Materials Research Society Proceedings
716, B3.4.1 (2002).
- Yi Wei, X. Hu, Y. Liang, D. Jordan, B. Craigo,
R. Droopad, Z. Yu, A. Demkov, J. Edwards Jr., and W. Ooms, "Mechanism of
cleaning Si (001) surface using Sr or SrO for the growth of crystalline SrTiO3
films", Journal of Vacuum Science and Technol. B 20, 1402
(2002).
- R. Liu et al., "Materials and physical
properties of novel high-k and medium-k gate dielectrics", Materials Research
Society Proceedings 670, p. K.1.1.1 (2002).
- X. Zhang, L. Fonseca, and A.A. Demkov, "First
–principles study of electron transport through atomistic
metal-oxide-semiconductor structures", in Proceedings of the 2002
International Conference on Computational Nanoscience, ICCN
2002, M. Laudon and B. Romanowicz, Eds. p. 322, (Computational
Publications, 2002).
- X. Zhang, L. Fonseca, and A.A. Demkov, "The
application of density functional, local orbitals, and scattering theory to
quantum transport", phys. stat. sol. (b) 233,
70 (2002).
- S. Gonzalez, D. Vasileska, and A. A. Demkov,
"Empirical pseudopotential method for the band structure calculation of strained
silicon germanium materials", Journal of Computational Electronics
1, 179 (2002).
- H.Li, X. Hu, Y. Wei, Z. Yu, X. Zhang, R.
Droopad, A.A. Demkov, J. Edwards, K. Moore, and W. Ooms, "Two dimensional growth
of high quality SrTiO3 thin films on Si", J. of Appl. Phys.
93,4521(2003).
- X. Hu et al., "The interface of
epitaxial SrTiO3 on silicon: in-situ and ex-situ studies",
Appl. Phys. Lett. 82, 203 (2003).
- R. Droopad,
Z. Yu, Hao Li, Y. Liang, C. Overgaard, A.A. Demkov, X. Zhang, K. Moore, K.
Eisenbeiser, Hu, J. Curless, and J. Finder, "Development of Integrated Heterostructures on Silicon by
MBE", Journal of Crystal Growth, 251, 638 (2003).
- X. Zhang, A.A. Demkov, H. Li, X. Hu, Y. Wei, and
J. Kulik, "The atomic and electronic structure of the Si /SrTiO3 interface",
Phys. Rev. B 68, 125323 (2003).
- L. Hilt Tisinger, R. Liu, J. Kulik, X. Zhang, J.
Ramdani, and A.A. Demkov, "Raman Studies of SrTiO3 Thin Films on Si", Journal of
Vacuum Science and Technol. B 21, 53 (2003).
- L. Fonseca, and A.A. Demkov, "Convergence issues
in ab-initio transport calculations through oxide barriers and
molecules", Proceedings of the 2003 International Conference on
Computational Nanoscience, ICCN 20 vol.2 , p.86-9, M. Laudon and B.
Romanowicz, Eds., (Computational Publications, 2003).
- S.V. Ushakov, C.E. Brown, A. Navrotsky, A.A.
Demkov, C. Wang, and B.-Y. Nguyen, "Thermal analyses of bulk amorphous oxides and silicates
of zirconium and hafnium."
(Materials Research Society Symposium Proceedings, 745 p. 3-8
(2003).
- L. Fonseca, A.A. Demkov, and A. Knizhnik,
"Difficulties of the microscopic theory of leakage current through ultra-thin
oxide barriers: point defects", phys. stat. sol. (b)
239, 48 (2003).
- L. Fonseca, A. Korkin, A.A. Demkov, X. Zhang,
and A. Knizhnik, "Atomistic calculation of leakage current through ultra-thin
metal-oxide barriers", Microelectronic Eng. 69, 130
(2003).
- J.
Sexton, S.I. Yi, M. Hale, P. Kruse, A.A. Demkov, and A. Kummel, "Displacement of
Surface Arsenic Atoms by Insertion of Oxygen Atoms into As-Ga Backbonds", J. of
Chem. Phys. 119, 9191 (2003).
- E.
Chagarov, A.A. Demkov, and J. Adams, "Ab-initio calculations of surface phase
diagrams of silica polymorphs", accepted for publication in the Physical Review
B.
- X. Zhang and A.A. Demkov, "A theoretical study
of Sr-induced reconstructions of the Si (001) surface", submitted for
publication in the Physical Review B.
- S. B. Samavedam, L. B. La, P. J. Tobin, B.
White, C. Hobbs, L. R. C. Fonseca, A. A. Demkov, et al.,"Fermi Level
Pinning with Sub-monolayer MeOx and Metal Gates", IEEE International Electron
Devices Meeting 2003 p.13.1.1 (2003).
- R. Droopad, K. Eisenbeiser, and A. A. Demkov,
"High-K Crystalline Gate Dielectrics – An IC Manufacturer¡¯s Perspective" in
"Alternative Gate Dielectrics", H. Huff and D. Gilmer Eds. (Springer,
2004).
- A.A. Demkov, L. Fonseca, J. Tomfohr, and O.F.
Sankey, "A band alignment problem at the Si-high-k dielectric interface", Mater.
Res. Soc. Proceedings, Vol.786, 29 (2004).
- A.A. Demkov, L. Fonseca, J. Tomfohr, and O.F.
Sankey, "Complexband structure and the band alignment problem at the Si-high-k
dielectric interface", submitter for publication in the Physical Review
B.
- S. V. Ushakov, A. Navrotsky, Y. Yang, S.
Stemmer, K. Kukli, M. Ritala, M. A. Leskelä, P. Fejes, A.A. Demkov, C. Wang,
B.-Y. Nguyen, D. Triyoso, and P. Tobin, "Crystallization in hafnia- and
zirconia-based systems", phys. stat. sol. (b), 241, 2268
(2004).
- Y. Liang and A. A. Demkov, "Epitaxial
Oxide/.Semiconductor Systems" in "Materials Fundamentals of Gate Dielectrics",
A. A. Demkov and A. Navrotsky Eds. (Springer, 2005).
- M. Niranjan, S. Zollner, L. Kleinman, and A.A.
Demkov, "Theoretical investigation of PtSi surface energies and work functions"
Phys. Rev. B 73, 195332 (2006).
- A.A. Demkov, "Thermodynamic stability and band
alignment at a metal high-k dielectric interface", Phys. Rev. B 74, 085310
(2006).
- C.M. Osburn, S.A. Campbell, A.A. Demkov, E.
Eisenbraun, E. Garfunkel, T. Gustafsson, A.I. Kingon, J. Lee, D.J.
Lichtenwalner, G. Lucovsky, T.P. Ma, J.P. Maria, V. Misra, R.J. Nemanich, G.N.
Parsons, D.G. Schlom, S. Stemmer, R.M. Wallace, and J. Whitten, "Materials and
Processes for High k Gate Stacks: Results from the FEP Transition Center",
(invited) ECS Transactions 3, 389 (2006).
- A.A. Demkov, O. Sharia, X. Luo, and J. k. Lee,
"Density functional theory of high-k dielectric gate stacks", (invited),
Microelectronics Reliability 47, 686 (2007).
- O. Sharia, A.A. Demkov, G. Bersuker, and B.H.
Lee, "Theoretical study of the insulator/insulator interface: band alignment at
the SiO2/HfO2 junction", Phys. Rev. B. 75, 035306 (2007).
- S. Zollner, J.P. Liu, P. Zaumseil, H.J. Osten
and A.A. Demkov, "Dielectric functions, elasto-optical effects, and
critical-point parameters for biaxially stressed Si1-yCy alloys on Si (001)",
Semiconductor Sci. and Technol. 22, S13 (2007).
- M. Niranjan, L. Kleinman, and A.A. Demkov,
"Theoretical investigation of Pt monosilicide and several germanides: electronic
structure, surface energetics, and work functions", accepted, (Materials
Research Society Symposium Proceedings, 2007).
- A.A. Demkov and J. Lee, "Band alignment at the
LaAlO3/SrTiO3 interface", accepted, (Materials Research Society Symposium
Proceedings, 2007).
- M. Niranjan, L. Kleinman, and A.A. Demkov,
"Theoretical investigation of PtGe and NiGe", Phys. Rev. B. 75, 085326
(2007).
- N. Sergueev, A.A. Demkov, and H. Guo, "Probing
molecular vibrations with inelastic resonant tunneling", Phys. Rev. B. 75,
233418 (2007).
- A.A. Demkov, O. Sharia, and J.K. Lee,
"Theoretical analysis of high-k dielectric gate stacks", Microelectronics
Engineering 84, 2032 (2007).
- J. Robertson, O. Sharia, and A.A. Demkov, "Fermi
level pinning by defects in HfO2-metal gate stacks", Appl. Phys. Lett. 91,
132912 (2007).
- Na Sai, J.K. Lee, C.J. Fennie, and A.A. Demkov,
"Spin dependent Schottky barrier at the YMO3/GaN interface", Appl. Phys. Lett.
91, 202910, (2007).
- O. Sharia, A.A. Demkov G. Bersuker and B.H.
Lee,"On the role of Al doping at the HfO2/SiO2 interface", Phys. Rev. B 77,
085326 (2008).
- M. Niranjan, L. Kleinman, and A.A. Demkov,
"Theoretical investigation of bonding and Schottky barrier height at the
GaAs(001)/NiGe(001) interface: an ab-initio study", Phys. Rev. B 77, 15316
(2008).
- X. Zhang and A.A. Demkov, "A theoretical study
of Sr-induced reconstructions of the Si (001) surface", J. of Appl. Phys. 103,
103710 (2008).
- H. Bentmann, S. Zollner, R. Gregory and A.A.
Demkov, "Surface properties of PtSi thin films", Phys. Rev. B 78, 205302
(2008).
- J.K. Lee and A.A. Demkov, "Charge origin and
localization at the n-type STO/LAO interface", Phys. Rev. B 78, 193104
(2008).
- X. Luo, A.A. Demkov, D. Triyoso, P. Fejes, R. Gregory and S. Zollner, "Combined
experimental and theoretical study of thin hafnia films", Phys. Rev. B 78,
245314 (2008)
- O. Sharia, K. Tse, J. Robertson and A.A. Demkov, "How defects at metal-oxide
interfaces modify band alignment" accepted in the Physical
Review B (2009)
- Na Sai, C.J. Fennie, and A.A. Demkov, "The absence of critical thickness in an
ultrathin improper ferroelectric film" accepted in the Physical
Review Letters (2009).
- N. Sergueev and A.A. Demkov,"On the theory of inelastic charge transfer in
polypeptide bridges", submitted to the Journal of Chemical Physics
- H. Bentmann, J, Houser, and A.A. Demkov, "Ab
initio study of In absorption and ..." submitted to the Physical
Review.
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