Dynamic Random-access Memory (DRAM):
The basic building block of any memory circuit is the cell in which
a single bit of information is stored. The DRAM has the simplest cell
structure, consisting of a single transistor and a capacitor. The figure below
shows a simplest example of a DRAM cell consisting of a single NMOS transistor
and a capacitor. The gate of the transistor is connected to a "row select" or
"wordline", and the source of the transistor is connected to the "bitline".
When both the wordline and the bitline are brought to high voltage, the
transistor is on, and charge can flow to the capacitor. If the capacitor
initially had no charge (stored zero), then charge flows into the
capacitor. If the capacitor initially is charged (stored one), then very
little charge flows into the capacitor. To read an individual bit, the sensing
circuitry measures the amount of charge that flows into the capacitor and
determines whether it is zero or a one. The capacitor is then refreshed by
either fully charging it or completely depleting it of charge, depending on
which state it was initially. The write cycle simply charges a capacitor to
the desired state 0 or 1 and the amount of charge needed is not measured.

How Flash memory works?
Flash memory has a grid of columns called bitline and rows called wordline
with a cell that has two transistors at each intersection as shown in the
following diagram.
Flash memory is a type of EEPROM chip. The figure below shows a cross
section of a single cell of flash memory. In short, a capacitor is stacked
on the top of a transistor. The lower electrode of the capacitor is also
the gate electrode of the transistor and it is called floating gate, the
upper electrode of the capacitor is called control gate and it is connected
to the world line.
Read, Write and Erase
To erase the cells of a chip to change the cell value to a "0" requires
Fowler-Nordheim tunneling. A negative electrical potential, usually -10-13
volts, is applied to the floating gate. The electrons stored in the floating
gate are drained to the source side of the transistor. The electrons in
the cells of a Flash memory chip can be returned to normal ("1") by the
application of a strong electric field. Flash memory uses in-circuit wiring
to apply the electric field to the entire chip, or to predetermined sections
known as blocks. Flash memory works much faster than traditional EEPROMs
because instead of erasing one byte at a time, it erases a block or the entire
chip, and then rewrites it. The writing process is through channel hot electron
injection. The control gate is applied with a voltage of 10-13 volts, the
source line is grounded and the bitline is applied a voltage about 5 volts.
The following table shows that the process of writing, erasing and reading.
Examples of Removable Flash memory cards:
Smart Media
Smart Media was originally developed by Toshiba. Smart Media cards are
available in capacities ranging from 2 MB to 64 MB, with 128 MB cards coming
soon. Smart Mediacards are elegant in their simplicity. A plane electrode
is connected to the Flash memorychip by bonding wires. The Flash memory chip,
plane electrode and bonding wires are embedded in a resin using a technique
called over molded thin package (OMTP). This allows everything to be integrated
into a single package without the need for soldering. The OMTP module is
glued to a base card to create the actual card. Power and data is carried
by the electrode to the Flash memory chip when the card is inserted into
a device. A notched corner indicates the power requirements of the Smart
Mediacard. Looking at the card with the electrode facing up, if the notch
is on the left side, the card needs 5 volts. If the notch is on the right
side, it requires 3.3 volts. Smart Mediacards erase, write and read memory
in small blocks (256 or 512 byte increments). This approach means that they
are capable of fast, reliable performance while allowing you to specify
what data you wish to keep.
Compact Flash
Compact Flash cards were developed by Sandisk in 1994, and they are different
from Smart Media cards in two important ways: They are thicker, and they
utilize a controller chip. Compact Flash consists of a small circuit board
with Flash memory chips and a dedicated controller chip, all encased in
a rugged shell that is several times thicker than a Smart Media card. Compact
Flash cards support dual voltage and will operate at either 3.3 volts or
5 volts. The increased thickness of the card allows for greater storage capacity
than Smart Media cards. Compact Flash sizes range from 8 MB to 192 MB. The
onboard controller can increase performance, particularly on devices that
have slow processors. The case and controller chip add size, weight and
complexity to the Compact Flash card when compared to the Smart Media card.
Defect Detection
The basic idea of defect detection is to compare the light intensity level
(gray level) for a candidate cell or die with two neighboring reference cell
or die to see if there is any difference. If a difference is found to be
above a certain threshold, then a defect is found. There are brightfield,
darkfield and e-beam inspection technologies. Brightfield and darkfield are
optical technologies, they can detect surface defects and defects in shallow
trenches quickly. E-beam technology is used to detect sub-surface defects.
Darkfield inspection technology is the throughput leader among the three
distinct inspection technologies. It uses a laser beam to illuminate the
wafer surface at a low angle, thereby minimizing light scatter from the wafer
surface and previous layers, and maximizing light scatter from defects and
other anomalies. The noise suppression capabilities of darkfield technology
enable high performance on CMP layers as well as rough and transparent films
such as thin film deposition layers. The typical inspection tools are
KLA-Tencor's AITx
and
Applied Materials' Excite
. Excite tools are fast and ideal for tool monitoring.
Brightfield inspection systems use a focused beam of broadband light to
illuminate the wafer. Different pixel sizes can be chosen to meet sensitivity
and throughput requirements. This inspection technology is widely used for
the etch layers. They can be used for array and random inspection. The typical
tools are
KLA-Tencor's KLA21xx
.
E-beam inspection technologies measure reflected electrons. Electrons
have much shorter wavelength than light, therefore the resolution of an
e-beam inspection is much higher than optical systems. Furthermore, E-beam
inspection systems are not gated by noise sources, such as grain noise,
color noise and previous layer noise, that can inhibit optical inspection.
The combination of high resolution and low noise allows e-beam systems to
detect defect down to 50 nm in size. The e-beam technologies can image the
bottom of high aspect ratio trenches and via holes and detect physical defects
in these structures. Also e-beam inspection systems allow the detection
of electrical failures within the device, using a technique called voltage
contrast. Because electrons carry charge, they can be used in the production
line to quickly detect defect mechanisms that cause electrical shorts and
opens. The typical tool is
KLA-Tencor's ES20XP
.
Defect Review Tools:
Leica
, JEOL
, Semvision
Defect Control and Analysis Softwares:
Klarity Defect
, Quest
, HPL Yieldirector